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Light scattering from the volume of optical thin films: theory and experiment

: Duparre, A.; Kassam, S.; Hehl, K.; Bussemer, P.; Neubert, J.

Applied optics 31 (1992), Nr.9, S.1304-1313
ISSN: 0003-6935
ISSN: 1539-4522
ISSN: 1559-128X
Fraunhofer IOF ()
dünne Schicht; electron microscopy; Elektronenmikroskopie; Lichtstreuung; light scattering; Mikrostruktur; Oberflächenrauheit; surface roughness; thin film microstructure

A theoretical model is presented that describes the volume scattering in thin optical films, particularly in typical columnar structures. It is based on a first-order perturbation theory that concerns the fluctuation of the dielectric permittivity in the film. For evaporated PbF2 films that show a pronounced columnar morphology, angular as well as total integrated scattering measurements at lambda = 633 nm have been performed on a special layer design to suppress roughness-induced scattering. A comparison of the predicted theoretical and the measured experimental values leads to such structural parameters as packing density and the evolutionary exponent of the columns.