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Laser machining of Si3N4 ceramics

Laserbearbeitung von Si3N4-Keramiken
 
: Burck, P.; Wiegel, K.

:

Optical and Quantum Electronics 27 (1995), S.1349-1358
ISSN: 0306-8919
ISSN: 1572-817X
Englisch
Zeitschriftenaufsatz
Fraunhofer IWS ()
ablation process; glass phase; laser machining; microstructure; Nd:YAG-Laser; silicon nitride; three-dimensional profiling

Abstract
Laser machining of ceramics is a promising alternative to diamond-based techniques. Technological problems and influencing factors are exemplified for the structural shaping of silicon nitride ceramics using Nd:YAG pulses of several hundred microseconds. Ablation rate and ablation geometry are discussed in relation to irradiation conditions and microstructures.

: http://publica.fraunhofer.de/dokumente/PX-21574.html