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Large-area pretreatment for physical vapor deposition

: Schiller, S.; Goedicke, K.; Milde, F.; Hötzsch, G.


Surface and coatings technology 76/77 (1995), Nr.2, S.725-730
ISSN: 0257-8972
International Conference on Metallurgical Coatings and Thin films <22, 1995, San Diego>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer FEP ()

Illustrated by the coating of strip steel and plate glass, we discuss the possibilities of matching the vacuum pretreatment to the high coating rates of large-area physical vapor deposition. The restricted applicability of conventional plasma pretreatment methods has led to the concept of interfacial (IFL) processing. This is meant to be a method by which remaining contamination layers and adsorbates on the substrate surface are converted into a useful (often plasma activated) intermediate layer.