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KUSET, knowledge based user support for electron beam testing

: Lackmann, R.; Weichert, G.

Belli, F.; Rademacher, F.:
5th International Conference on Industrial and engineering applications of artificial intelligence and expert systems
Berlin: Springer, 1992 (Lecture Notes in Computer Science 604)
ISBN: 0-387-55601-X
ISSN: 0302-9743
International Conference on Industrial and Engineering Applications of Artificial Intelligence and Expert Systems <5, 1992, Paderborn>
Fraunhofer IMS ()
diagnosis; electron beam testing; Elektronenstrahl; error analysis; expert system; Expertensystem; Fehleranalyse; integrated circuit; integrierte Schaltung

The implementation of an expert system into the operating environment of an Electron Beam Tester (EBT) is presented. The concept of a knowledge based approach was chosen to meet the specific requirements for supporting the operation and maintenance of highly complex measurement equipment. The expert system KUSET (Knowledge-based User Support for Electron Beam Testing) allows an automatic online diagnosis of the EBT system's performance and offers a variety of tools to assure effectiveness and continuity in the EBT engineering work. A newly designed microprocessor-based hardware, the Modular Control System (MCS) provides a flexible and powerful link between the expert system KUSET and the hardware world of our measurement equipment.