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Investigation of SiGe/Si-heterostructures with high resolution X-ray diffraction methods

 

European Powder Diffraction Conference 1998. Scientific programme and abstracts
Budapest, 1998
S.117
European Powder Diffraction Conference (EPDIC) <6, 1998, Budapest>
Englisch
Konferenzbeitrag
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Heterostruktur; Röntgenstrahlbeugung; SiGe; SIMOX

Abstract
The application of SiGe/Si-heterostructures in semiconductor devices allows to influence the optical and the electronical properties in a specific way. X-ray methods and results for the characterization of these heterostructures are presented in this contribution.

: http://publica.fraunhofer.de/dokumente/PX-19936.html