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Investigation of physical processes in PLD of ceramics by excimer laser radiation

: Kreutz, E.W.; Alunovic, M.; Aden, M.; Nießen, M.


Surface and coatings technology 97 (1997), S.85-89 : Ill., Lit.
ISSN: 0257-8972
Fraunhofer ILT ()
alumina; laser-induced plasma; laser-induced vapour; pulsed laser deposition

A probe beam deflection technique is applied to investigate the vapour/plasma generated during material removal by laser radiation. The electron density and geometry of the expanding vapour/plasma are investigated during material removal of an Al2O3 target with pulsed excimer laser radiation. The results obtained by the beam deflection technique are compared with those of high-speed photography.