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An invasive catheter flow sensor with on-chip CMOS read-out electronics for the online determination of blood flow


Middelhoek, S.:
Transducers '95. Proceedings of the 8th International Conference on Solid-State Sensors and Actuators, Eurosensors IX. Part 3
Amsterdam: Elsevier, 1996 (Sensors and actuators. A Physical)
International Conference on Solid-State Sensors and Actuators <8, 1995, Stockholm>
Eurosensors <9, 1995, Stockholm>
Fraunhofer IMS ()
Blutdurchflußmessung; CMOS-Technik; Durchflußsteuerung; Kardiographie; medizinische Meßtechnik; MOS-Schaltung

A silicon flow sensor with integrated electronics for invasive blood flow measurement has been developed and investigated. The flow sensor is based on a silicon-on-insulator SIMOX substrate (Separation by Implated Oxygen) with a backside etched silicon membrane containing oxide trenches and uses a differential thermal measurement principle. The chosen fabrication process is fully CMOS-compatible. An on-chip switched capacitor circuitry converts the flow signal into a pulse width modulated signal. The device has been tested in a blood circulation simulator in the flow range of 0-10 l/min.