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Interferometrische Messung der Form, Welligkeit und Rauheit feinbearbeiteter Oberflächen

: Nyarsik, L.; Körner, K.; Krahn, A.; Spur, G.

Technisches Messen : TM 59 (1992), Nr.11, S.423-427
ISSN: 0340-837X
ISSN: 0178-2312
ISSN: 0171-8096
Fraunhofer IPK ()
feinbearbeitete Oberfläche; fine-machined surface; Formmessung; Interferometrie; interferometry; measurement of form; prism interferometer; Prismeninterferometer; Rauheitsmessung; waviness and roughness; Welligkeitsmessung

A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.