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Intelligent image processing for liquid etching processes

 
: Koch, M.; Knobloch, J.

Zimmermann, H.-J. ; European Laboratory for Intelligent Techniques Engineering:
EUFIT '99
Aachen: Verl. Mainz, 1999
ISBN: 3-89653-808-X
European Congress on Intelligent Techniques and Soft Computing (EUFIT) <7, 1999, Aachen>
Englisch
Konferenzbeitrag
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Bildverarbeitung; Fuzzy-Logik

Abstract
To determine the exact duration of liquid etching processes on spin-etchers an add-on device was developed which analyses optical properties of the wafer surface through a camera. The image processing is performed on normal PC hardware. A modular software structure is described, amd the results of applying fuzzy methods in various parts of the algorithm are presented.

: http://publica.fraunhofer.de/dokumente/PX-19491.html