Options
1992
Conference Paper
Titel
An intelligent 500 V power vertical DMOS on SIMOX substrate. Part 2
Abstract
High voltage smart power IC's need dielectric insulation to make high voltage switching possible without influencing the low voltage part. Locally applied SIMOX is used to isolate a 2 fm CMOS process from a vertical 500 V, 10 A HVDMOS transistor. Additional field shielding eliminates any cross talk during switching. A 15 mask process gives circuits for motor control or off-line applications.