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A highly flexible design and production framework for modularized microelectromechanical systems


Institute of Electrical and Electronics Engineers -IEEE-; IEEE Robotics and Automation Society:
Micro Electro Mechanical Systems 1998
Piscataway, NJ: IEEE, 1998
ISBN: 0-7803-4412-X
International Workshop on Micro Electro Mechanical Systems (MEMS) <11, 1998, Heidelberg>
Fraunhofer IPA ()
Fraunhofer IZM ()
Fertigung; framework; Konstruktion; MEMS; mikroelektromechanisches System; Mikroelektronik; Mikromechanik; modul; modularisierung

A highly flexible modular design and production framework for microelectromechanical systems, suitable for midscale production at reasonable costs is introduced. The modular framework consists of a manufacturer set and an application kit. It allows for considerable reduction of design and production expenditure whilst retaining maximum technical flexibility. A novel vertical integration technique (TB2GA) for the realization of modular microelectromechanical systems is presented. Development and standardization of homogeneous mechanical, optical, information, power supply and media interfaces are discussed. The feasibility of the modular approach is demonstrated by the realization of modular microsystems combining TB2GA multimodule stacks, interfaces, plugs, and enclosure.