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The growth of buried silicon nitride formed by nitrogen implantation
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1986
Conference Paper
Titel
The growth of buried silicon nitride formed by nitrogen implantation
Author(s)
Beltz, J.
Vogt, H.
Kaat, E.H. te
Zimmer, G.
Hauptwerk
E-MRS Meeting 1986. Proceedings
Konferenz
European Materials Research Society (Meeting) 1986
Language
English
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Fraunhofer-Institut für Mikroelektronische Schaltungen und Systeme IMS