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Grazing-incidence interference microscopy for the measurement of topography of fine-machined surfaces

: Spur, G.; Körner, K.; Nyarsik, L.; Fritz, H.; Uhlmann, E.

ACS Organisations GmbH, Wunstorf:
Sensor. 6. Internationale Fachmesse mit Kongreß für Sensorik und Systemtechnik. Bd.3. Proceedings
Wunstorf, 1993
Sensor <6, 1993, Nürnberg>
Fraunhofer IPK ()
feinbearbeitete Oberfläche; fine-machined surface; grazing incidence illumination; grazing incidence microscope; Interferometrie; interferometry; measurement; Messung; prism interferometer; Prismeninterferometer; Schräglicht-Interferenzmikroskop; Schräglichtbeleuchtung

A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer and in a new grazing incidence microscope. Test measurements are represented and discussed.