Options
1991
Conference Paper
Titel
Gassensitive MOSFETs with an adsorbing dielectric layer
Abstract
MOSFETs are widely used elements in the development of gassensors. Besides MOSFETs with palladium for the gate metallization also other structures find attention. In this paper results of the combination of a MOSFET with a gasadsorbing dielectric layer are presented. The material of this layer are heteropolysiloxanes, which were already used for gassensitive interdigital capacitors.
Konferenz
Language
English