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Future Smif-Integration for Semiconductor Fabrication

: Herzog, O.; Klumpp, B.; Schließer, J.

Institute of Environmental Sciences -IES-, Mt. Prospect/Ill.:
Developing future leaders of technology. 41st Annual Technical Meeting. Vol.1: Symposium on Online-Monitoring, Symposium on Minienvironments, Symposium on Biocontamination Control. Contamination Control
Mount Prospect, Ill.: IES, 1995
ISBN: 1-87786-241-X
ISBN: 1-87786-242-8
Institute of Environmental Sciences (Annual Technical Meeting) <41, 1995, Anaheim>
Fraunhofer IPA ()
CIM; Fabrikplanung; Fertigung; Halbleiterfertigung; Mikroelektronik; minienvironment; Planung; SMIF; SMIF System; Wirtschaftlichkeit

SMIF technology for microelectronic production lines being increasingly used worldwide. A crucial factor for an economical SMIF solution is the planning phase, where the general approach to the project should aim for an integrated solution. It is necessary to pursue the integrated concept right from the beginning of the planning phase in order to achieve a high reliability form a production line with SMIF automation. The main requirement of the philosophy is to provide process tools with integrated SMIF solutions. For the success of the project, process tools including SMIF and minienvironment components must be purchased. The main priority of a SMIF project is to discuss with tool vendors and SMIF/Minienvironment OEM vendors before purchasing the process equipment. This paper describes the procedures, interfaces and requirements necessarey to realize a SMIF manufacturing line with a high number of integrated SMIF process tool solutions.