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Full-wafer mounting technologies for silicon micropumps
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1997
Conference Paper
Titel
Full-wafer mounting technologies for silicon micropumps
Author(s)
Linnemann, R.
Richter, M.
Kluge, S.
Klink, G.
Landesberger, C.
Woias, P.
Hauptwerk
Eurosensors XI. Proceedings
Konferenz
Eurosensors 1997
Language
English
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