English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Free 3D shaping with grey-tone lithography and multidose e-beam writing
Details
Full
Export
Statistics
Options
1998
Conference Paper
Titel
Free 3D shaping with grey-tone lithography and multidose e-beam writing
Author(s)
Kalus, M.
Frey, M.
Buchmann, L.-M.
Reimer, K.
Wagner, B.
Hauptwerk
Micro- and nanoengineering 97 - MNE. Proceedings of the International Conference on Micro- and Nanofabrication 1997
Konferenz
International Conference on Micro- and Nanofabrication (MNE) 1997
Language
English
google-scholar
View Details
IFT
Fraunhofer-Institut für Siliziumtechnologie ISIT