English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Fragmentation processes in reactive molecular ion beam etching
Details
Full
Export
Statistics
Options
1993
Journal Article
Titel
Fragmentation processes in reactive molecular ion beam etching
Author(s)
Hoffmann, P.
Stoll, H.-P.
Heinrich, F.
Zeitschrift
Journal of applied physics
DOI
10.1063/1.354977
Language
English
google-scholar
View Details
Fraunhofer-Institut für Siliziumtechnologie ISIT