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Ferroelectric thin films in the system PZT

 
: Merklein, S.; Sporn, D.; Schönecker, A.

Duran, P.; Fernandez, J.F. ; European Ceramic Society:
Third Euro-Ceramics 1993. Proceedings of the Third European Ceramic Society Conference. Vol.2: Properties of ceramics
Castellon de la Plana: Faenza Editrice Iberica, 1993
ISBN: 84-87683-06-1
S.711-716
Euro-Ceramics (ECerS) <3, 1993, Madrid>
Englisch
Konferenzbeitrag
Fraunhofer IKTS ()
dielectric; ferroelectric property; ferroelectric thin film; PTZ; sol-gel

Abstract
A new one step deposition process for smooth and crackfree films with a thickness equal or bigger than 1 mym has been developed in the system Pb(Zr1-x Tix)O3 (PZT). The films showed device-worthy dielectric and ferroelectric properties with typical values for the Pr, Ec and epsr of 14 myC/cm2, 7kV/mm and 950 respectively.

: http://publica.fraunhofer.de/dokumente/PX-14168.html