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Fabrication of magnetic microstructures by using thick layer resists

: Löchel, B.; Maciossek, A.; König, M.; Huber, H.-L.; Bauer, G.

	Microelectronic engineering 21 (1993), Nr.1-4, S.463-466 ISSN: 0167-9317
	International Conference on Microcircuit Engineering (ME) <18, 1992, Erlangen>

	Englisch
	Konferenzbeitrag
	Fraunhofer ISIT ()
	coils; electric sensing devices; electroplating; iron alloys; micromechanical devices; nanotechnology; nickel alloys; photoresists

Abstract
A fabrication process for 3D ferromagnetic micro patterns of an Fe/Ni alloy, based on conventional UV contact printing for thick resist layers, and on a pulse galvanoplating process, was investigated to form microstructures with high layer thickness and high aspect ratio. Resist patterns with 5 to 10 mu m minimum feature size and up to 80 mu m height were fabricated. From a weakly acidic Fe/Ni bath alloyed layers with Fe content up to 55% were deposited. The formed material has excellent corrosion resistivity and mechanical properties comparable to stainless steel. The material was found to be ferromagnetic with a high permeability.