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Fabrication of acceleration sensors using a new SIMOX technology for stiction free low stress

: Geiger, W.; Erlebach, A.; Köhler, R.; Kück, H.

Puers, R. ; Catholic Univ., Leuven:
Eurosensors X. Proceedings
Leuven: Catholic University, 1996
ISBN: 90-803282-1-9
S.1121-1124 : Lit.
Eurosensors <10, 1996, Louvain>
Fraunhofer IMS, Außenstelle Dresden ( IPMS) ()
Beschleunigungssensor; CMOS-Technik; Mikromechanik; Mikrosystem; SIMOX

We report on a new fabrication technology for micromechanical devices using SIMOX substrates and surface micromachining. The technology is designed for stiction free and minimum stress devices. It is well suited for integration with CMOS readout electronics. Using this technology we have designed and fabricated acceleration sensors for the 50g-range. The sensors have an excellent linear response and the electromechanical behaviour can be nicely described by theory.