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Fabrication of 100 nm polysiliconemitter transitors using e-beam lithography
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1995
Journal Article
Titel
Fabrication of 100 nm polysiliconemitter transitors using e-beam lithography
Author(s)
Webster, M.N.
Tuinhout, A.
Verbruggen, A.H.
Romijn, J.
Radelaar, S.
Löchel, B.
Jos, H.F.F.
Moors, P.M.A.
Zeitschrift
Microelectronic engineering
DOI
10.1016/0167-9317(94)00063-Z
Language
English
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Fraunhofer-Institut fĂĽr Siliziumtechnologie ISIT