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Experiences with thermal effects in minienvironments and methods for obtaining and optimized airflow pattern

: Schließer, J.; Limperich, D.

Institute of Environmental Sciences -IES-, Mt. Prospect/Ill.:
Expanding our technical excellence through education. 42nd Annual Technical Meeting. Vol.2: Product reliability, design, test, and evaluation
Mount Prospect, Ill.: IES, 1996
ISBN: 1-87786-250-9
ISBN: 1-87786-252-5
Institute of Environmental Sciences (Annual Technical Meeting) <42, 1996, Orlando/Fla.>
Fraunhofer IPA ()
airflow; minienvironment; Reinraum

Cleanroom technology trends are moving away from conventional systems and towards localized areas - so-called minienvironments. Until now, production facilities have been provided as ballrooms, clean-benches or minienvironments with a simple ecapsulation, either in connection with a cleanroom ceiling, or with their own air-purification systems. The encapsulation often consits of simple wall units with access for maintenance. However, the optimal airflow and cleanlines around the product cannot be achieved with this method. The minienvironment should centre on the optimization of airflows around the product, fulfilling the highest requirements of cleanliness possible. The goal of minienvironment technology is to provide a "product cleanroom" only in the immediate surrounding where the product demands cleanroom conditions. One of the greatest influences on the first airflow pattern in minienvironments or in product cleanrooms is from hot processes such as hotplates. The thermals that are created by the hotplate directly affect.