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1989
Journal Article
Titel
Excimerlaser für die Mikrobearbeitung
Alternative
Excimerlaser for microprocessing
Abstract
Excimer lasers for special microfinishing. Excimer lasers with their UV radiation are just beginning to be industrially exploited. They achieve high levels of performance when called upon to modify a surface finish and to bore tiny holes in metal, plastics and glass. The data and examples provided here permit to assess their practical application.