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Excimerlaser für die Mikrobearbeitung

Excimerlaser for microprocessing
 
: Schulze, W.; Wehner, M.; Herziger, G.; Poprawe, R.

F und M. Feinwerktechnik und Meßtechnik 97 (1989), Nr.8/9, S.359
ISSN: 0340-1952
Deutsch
Zeitschriftenaufsatz
Fraunhofer ILT ()
Edelgas-Halogenid-Laser; excimer laser; microprocessing; Mikrobearbeitung; noble-gas-halid-laser; pulse power; Pulsleistung; Quantenenergie; quantum energy

Abstract
Excimer lasers for special microfinishing. Excimer lasers with their UV radiation are just beginning to be industrially exploited. They achieve high levels of performance when called upon to modify a surface finish and to bore tiny holes in metal, plastics and glass. The data and examples provided here permit to assess their practical application.

: http://publica.fraunhofer.de/dokumente/PX-13374.html