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Evaluation of stiffness, hardness and adhesion of thin films

Die Bewertung von Steifigkeit, Härte und Haftung dünner Schichten
: Schädlich, S.; Schneider, D.; Schultrich, B.

Hoffmann, H.:
Trends and new applications of thin films. Proceedings of the 6th International Symposium
Uetikon-Zürich: Trans Tech Publications, 1998 (Materials Science Forum 287/288)
ISBN: 0-87849-815-X
International Symposium on Trends and New Applications in Thin Films (TATF) <6, 1998, Regensburg>
Fraunhofer IWS ()
adhesion; Haftung; hardness; Härte; Steifigkeit; stiffness

For optimum adaptation of thin films to the special demands of industrial applications a complex of mechanical testing methods is desirable connecting fundamental properties concerning the deformation behavior, damage processes under controlled mechanical (and/or thermal) loading, tribological tests reflecting the real application conditions. Such a set of methods combining well-established tests with own special developments is in the following presented.