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Evaluation of interference patterns in a prism interferometer

 
: Spur, G.; Nyarsik, L.; Körner, K.; Fritz, H.

Jüptner, W.; Osten, W.:
Fringe '93. 2nd International Workshop on Automatic Processing of Fringe Patterns
Berlin: Akademie-Verlag, 1993 (Physical Research 19)
ISBN: 3-05-501612-2
S.230-235
International Workshop on Automatic Processing of Fringe Patterns (Fringe) <2, 1993, Bremen>
Englisch
Konferenzbeitrag
Fraunhofer IPK ()
Abbildungseigenschaft; anamorphic optical imaging characteristic; anamorphotisches optisches element; element; grazing incidence illumination; interferometric increment; interferometrisches Inkrement; macro profile; Makroprofil; micro structure; Mikrostruktur; prism interferometer; Prismeninterferometer; Schräglichtbeleuchtung

Abstract
Prism interferometers allow a ten times enlargement of the interference increment by means of grazing incidence of the objects's surface. Experiments were performed attempting to use a prism interferometer for measuring both the macro profile and the micro structure of technical surfaces. Because anamorphic elements are used in the prism interferometer, it was necessary to carry out a theoretical analysis of the system's imaging characteristics. An experimental method was suggested and experiments with a prototype system were performed.

: http://publica.fraunhofer.de/dokumente/PX-13267.html