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The European thrust in an international effort to create minienvironment standards

 
: Schließer, J.; Seybold, D.

Institute of Environmental Sciences -IES-, Mt. Prospect/Ill.:
Education for technical excellence. 40th Annual Technical Meeting. Vol.1: Contamination control, Symposium on Minienvironments, Symposium on Biocontamination Control
Mount Prospect, Ill.: IES, 1994
ISBN: 1-87786-244-4
ISBN: 1-87786-245-2
S.384-386
Institute of Environmental Sciences (Annual Technical Meeting) <40, 1994, Chicago/Ill.>
Englisch
Konferenzbeitrag
Fraunhofer IPA ()
Jessi; minienvironment; Reinraumtechnik; Umwelt

Abstract
This paper describes the international minienvironment standardization activity originating from the European JESSI project AUTOWEC and managed by SEMI's European Equipment Automation Committee.

: http://publica.fraunhofer.de/dokumente/PX-13214.html