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Estimation of heat transfer in SOI-MOSFETs

 
: Berger, M.; Chai, Z.

:

IEEE transactions on electron devices 38 (1991), Nr.4, S.871-875
ISSN: 0018-9383
Englisch
Zeitschriftenaufsatz
Fraunhofer IMS ()
heat transfer; Selbsterwärmung; self-heating; SOI-Transistor; Wärmetransport

Abstract
This paper describes and quantifies heat flow in MOSFET's built on SIMOX wafers. SOI structures are examined numerically to show the influence of connection lines and different materials on the heat transport. Correct boundary conditions for device simulation and analytical expressions for compact models are derived. Bulk and SOI technologies are compared.

: http://publica.fraunhofer.de/dokumente/PX-13154.html