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Electromechanical modeling beyond VHDL-AMS

: Voßkämper, L.; Lüdecke, A.; Leineweber, M.; Pelz, G.

International Workshop on Behavioral Modeling and Simulation 1999. Proceedings
Orlando, Fla., 1999
International Workshop on Behavioral Modeling and Simulation (BMAS) <1999, Orlando/Fla.>
Fraunhofer IMS ()
analytical modeling; circular diaphragm; Drucksensor; multi-domain simulation; pressure sensor; simulation; touch mode

Analytical modeling for electromechanics sometimes requires features like the representation of bended structures, the inclusion of (moving) boundary conditions or spatial integrations and differentiations. All these points are currently not directly addressed in VHDL-AMS and other analog hardware description languages. This paper illustrates this, using the example of a capacitive pressure sensor. The behavior of the introduced model is verified with finite element analysis.