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Efficient design and optimizatíon of MEMS by integrating commercial simulation tools

: Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F.


Middelhoek, S.:
Transducers '97. Proceedings of the 9th International Conference on Solid-State Sensors and Actuators
New York: Elsevier Science, 1998 (Sensors and actuators. A Physical)
ISSN: 0924-4247
S.15-20 : Lit.
International Conference on Solid-State Sensors and Actuators <9, 1997, Chicago/Ill.>
Fraunhofer IFT; 2000 dem IZM eingegliedert
Computer Aided Design (CAD); electric engineering computing; microactuator; micromechanical devices; microsensor; optimization; semiconductor device models; simulation; software tools; SPICE

This article presents a simulation tool for developing and characterizing microelectromechanical systems (MEMS). Because of the heterogeneous structure of microsystems, MEMS simulation requires different grades of abstraction and needs the cooperation of different disciplines. The advantage of the demonstrated modular concept consists in the flexibility of the program structure and the reduction of costly software support by integrating commercial simulators. A novel application manager controls the different subprograms by specific drivers and ensures the data management for parametric studies. So the behaviour of complex systems and the interactions of components of MEMS can be analysed and optimized during the design process, resulting in shorter manufacturing cycles.