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1992
Conference Paper
Titel
E-beam induced fabrication of microstructures
Abstract
E-beam induced deposition of metal from a metal organic gas has been used for the formation of microstructures of various geometries. Three examples: line deposition, needle growth and bridge formation have been selected for demonstration. Important parameters of the W deposition process from W(CO)sub6 gas are given like minimum feature size, positional accuracy and growth rate.