Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Dünne Schichten zerstörungsfrei prüfen

Nondestructive testing of thin films

	Metalloberfläche : mo (1996), Nr.1, S.43-48 ISSN: 0026-0797 ISSN: 0043-2792

	Deutsch
	Zeitschriftenaufsatz
	Fraunhofer IWS ()
	Bornitrid; boron nitride; carbon film; E-Modul; hardness; Kohlenstoff-Schichten; Oberflächenwelle; Schichthärte; surface wave; titanium nitride; Titannitrid; Ultraschall; ultrasonic wave; Young's modulus

Abstract
The feasible characterization of layer materials is decisive for optimizing the surface properties and for quality assurance. The module of elasticity and/or density of thin and very thin layers down to 100 nanometres can be determined quickly and reliably by means of high-frequency ultrasonic surface wave,, excited by short laser pulses

: http://publica.fraunhofer.de/dokumente/PX-10287.html