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Characterisation of BaxSr1-xTiO3 films using spectroscopic ellipsometry, Rutherford backscattering spectrometry and X-ray diffraction

Charakterisierung von BST-Schichten unter Verwendung von Spektralellipsometrie, RBS und XRD
: Petrik, P.; Khanh, N.Q.; Horvath, Z.E.; Zolnai, Z.; Barsony, I.; Lohner, T.; Fried, M.; Gyulai, J.; Schmidt, C.; Schneider, C.; Ryssel, H.


Journal of non-crystalline solids 303 (2002), Nr.1, S.179-184
ISSN: 0022-3093
Fraunhofer IIS B ( IISB) ()

Optical, compositional, and structural properties of BaxSr1-xTiO3 (BST) films prepared by metal-organic chemical vapor deposition on platinum-coated oxidized silicon were characterized using three non-destructive techniques, spectroscopic ellipsometry (SE), Rutherford backscattering spectrometry (RBS), and X-ray diffraction (XRD). The thicknesses and the refractive indices of the BST layers were calculated by SE in a wide spectral range from near UV to near IR using the Cauchy dispersion model. The spectra of the real and imaginary parts of the refractive indices sensitively indicate the presence of BST phase. The samples were characterized by RBS with a 3.5 MeV 4He+ ion beam to utilize the better heavy mass separation at high ion energies. At this energy, the non-Rutherford cross-section for carbon is about six times higher than its Rutherford cross section. A good correlation was found between the stoichiometric and structural properties measured by RBS and XRD, and the optical prope rties obtained by SE. It was shown that the significant changes in composition and texture of the BST layers were reflected by the fast optical measurement performed by SE.