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Sub-micron referencing system for ultraprecision machining processes

: Brecher, C.; Weinzierl, M.; Rashid, A.; Schmitt, R.; Köllmann, D.

Dimov, S.; Menz, W. ; European Commission:
4M 2008, Fourth International Conference on Multi-Material Micro Manufacture : 9th - 11th September 2008, Cardiff, UK
Dunbeath: Whittles, 2008
ISBN: 978-1-904445-76-0
ISBN: 1-904445-76-4
4 S.
International Conference on Multi-Material Micro Manufacture (4M) <4, 2008, Cardiff>
Fraunhofer IPT ()
Feinbearbeitung; Diamantwerkzeug; Feinwerktechnik; Einspannung; Fertigungsautomatisierung; Fertigungsgenauigkeit; Prozessmesstechnik; Submikrometerbereich; Formabweichung; elastische Verformung; Maschinenschwingung; Schnittkraft; Messen geometrischer Größen; spanende Bearbeitung

The set-up of ultraprecision machining processes is characterized by manual process steps which require a lot of personal skill and experience to full fill sub-micron requirements in form accuracy. Besides the fact that these manual process steps require a lot of time, they individualize each ultraprecision machined work piece and therefore prevent ultraprecision machining processes from becoming universal and cost efficient machining processes for high precision work pieces. To overcome this deficit, automation solutions are developed within the European Integrated Project (IP) Production4mue which enable the realization of efficient ultraprecision process chains with a high level of accuracy. In this paper, a sub-micron referencing system is introduced, which has been developed within this IP to contribute to the high accuracy process chains by enabling the automated and repeatable clamping of work pieces with submicrometer deviations from their original position. This does not only enable the efficient combination of different machine-tools and processes but also allows for an increase in product quality. Here a 3R MACRO-Nano chuck, a high accuracy work piece clamping device featuring lapped references has been introduced. After the characterization of the repeatable accuracy of the device itself, the MACRO-Nano chuck has been tested in a diamond machining environment. The form deviations of the machined test sample have been characterized by two independent measurement methods with a maximum deviation of lower than 0.6 micro meter. No adverse effects on the work piece shape or surface quality due to elastic deformations or vibrations caused by machining forces have been recognized.