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Deposition of PZT thin films on copper-coated polymer foils - challenges and perspectives

 
: Suchaneck, G.; Hubicka, Z.; Dejneka, A.; Guenther, M.; Günther, S.; Meyer, B.; Jastrabik, L.; Gerlach, G.; Schultheiß, E.

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Ferroelectrics 379 (2009), Nr.1, S.107-112
ISSN: 0015-0193
ISSN: 1563-5112
International Russia-Commonwealth of Independent States-Baltic States-Japan Symposium on Ferroelectricity (RCBJSF) <9, 2008, Vilnius>
Englisch
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer FEP ()
Sputtern; Zerstäuben; Elektrotechnik; Kristallwachstum; Polymerfilm

Abstract
In this work, the synthesis of (111)-textured PZT on Cu-coated polymer substrates is demonstrated by means of a RF-modulated plasma-jet system comprising a hollow cathode for reactive sputtering. Ion bombardment during film growth and lead stoichiometry are shown to be key parameters for the improvement of the PZT thin film quality.

: http://publica.fraunhofer.de/dokumente/N-96219.html