Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Deposition of PZT thin films on copper-coated polymer foils - challenges and perspectives

: Suchaneck, G.; Hubicka, Z.; Dejneka, A.; Guenther, M.; Günther, S.; Meyer, B.; Jastrabik, L.; Gerlach, G.; Schultheiß, E.


Ferroelectrics 379 (2009), Nr.1, S.107-112
ISSN: 0015-0193
ISSN: 1563-5112
International Russia-Commonwealth of Independent States-Baltic States-Japan Symposium on Ferroelectricity (RCBJSF) <9, 2008, Vilnius>
Zeitschriftenaufsatz, Konferenzbeitrag
Fraunhofer FEP ()
Sputtern; Zerstäuben; Elektrotechnik; Kristallwachstum; Polymerfilm

In this work, the synthesis of (111)-textured PZT on Cu-coated polymer substrates is demonstrated by means of a RF-modulated plasma-jet system comprising a hollow cathode for reactive sputtering. Ion bombardment during film growth and lead stoichiometry are shown to be key parameters for the improvement of the PZT thin film quality.