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2009
Journal Article
Titel
Deposition of PZT thin films on copper-coated polymer foils - challenges and perspectives
Abstract
In this work, the synthesis of (111)-textured PZT on Cu-coated polymer substrates is demonstrated by means of a RF-modulated plasma-jet system comprising a hollow cathode for reactive sputtering. Ion bombardment during film growth and lead stoichiometry are shown to be key parameters for the improvement of the PZT thin film quality.
Author(s)