English
Deutsch
Log In
Password Login
or
Log in with Fraunhofer Smartcard
Research Outputs
Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Artikel
Layer-by-layer interference lithography of three-dimensional microstructures in SU-8
Details
Full
Export
Statistics
Options
2009
Journal Article
Titel
Layer-by-layer interference lithography of three-dimensional microstructures in SU-8
Author(s)
Lasagni, A.F.
Yuan, D.J.
Das, S.
Zeitschrift
Advanced engineering materials
DOI
10.1002/adem.200800382
Language
English
google-scholar
View Details
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS