Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Experimental observation of FIB induced lateral damage on silicon samples

Poster at 34th International Conference on Micro&Nano Engineering, MNE 2008, Athens

Volltext urn:nbn:de:0011-n-956924 (1.5 MByte PDF)

MD5 Fingerprint: 253bf7e7a13d9ca5fddbf9a1b95c9176

Erstellt am: 16.6.2009

	2008, 1 Folie International Conference on Micro- and Nano-Engineering (MNE) <34, 2008, Athens>

	Englisch
	Poster, Elektronische Publikation
	Fraunhofer IISB ()
	focused ion beam; ion implantation damage; scanning capacitance microscopy; scanning spreading resistance microscopy