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New materials in future memories: High temperature behaviour of Sr, Bi and Ir on silicon surfaces monitored by TXRF and ELYMAT

 
: Kilian, G.; Kolbesen, B.O.; Rommel, M.; Pamler, W.; Unger, E.; Höpfner, A.

Kolbesen, B.O. ; Electrochemical Society -ECS-, Electronics Division:
Crystalline defects and contamination. Their impact and control in device manufacturing III : Proceedings of the satellite symposium to ESSDERC 2001, Nuremberg, Germany / DECON 2001
Pennington, NJ: ECS, 2001 (Electrochemical Society. Proceedings 2001-29)
ISBN: 1-566-77363-6
ISSN: 0091-391X
S.215-222
Satellite Symposium on Crystalline Defects and Contamination - Their Impact and Control in Device Manufacturing (DECON) <3, 2001, Erlangen>
European Solid-State Device Research Conference (ESSDERC) <31, 2001, Nürnberg>
Englisch
Konferenzbeitrag
Fraunhofer IISB ()
TXRF; Elymat; contamination; silicon

: http://publica.fraunhofer.de/dokumente/N-95687.html