Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.

Mechanical and barrier properties of thin oxide films on flexible polymer substrates

Mechanische und Sperreigenschaften von dünnen Oxidschichten auf flexiblen Polymersubstraten
: Fahlteich, J.; Schönberger, W.; Meyer, B.; Fahland, M.; Schiller, N.

Society of Vacuum Coaters -SVC-, Albuquerque/NM:
Society of Vacuum Coaters. 51st Annual Technical Conference 2008. Proceedings : April 19 - 24, 2008, Chicago, IL, USA
Albuquerque: SVC, 2008
Society of Vacuum Coaters (Annual Technical Conference) <51, 2008, Chicago/Ill.>
Fraunhofer FEP ()
Kunststoff; Flexibilität; Magnetron-Sputtern; Mikroelektronik; Sperrschicht; Zinkoxid; Zinnoxid

Flexible organic electronic devices require an encapsulation to avoid degradation of both the front electrode and the active layer itself. To meet the high barrier requirements many groups suggest multilayer stacks. We developed a concept to produce low cost transparent high barrier layer stacks by combining reactively sputtered barrier layers with an interlayer grown by magnetron based PECVD. In this work both the sputtered layers and the PECVD layers will be characterized regarding their mechanical and barrier properties. The layers were deposited using a dual magnetron system in a lab-scale roll-to-roll coating unit. The nano-hardness of plasma polymer layers was determined for different film compositions. Looking at the barrier properties, reactively sputtered zinctinoxide (ZTO) is a promising high-barrier material with very low permeation rates. The oxygen and water vapour permeation rates of ZTO are compared to other sputtered metal oxide layers. It is shown that the barrier performance strongly depend on the reactive sputtering mode. Finally first results regarding the deposition of a multilayer stack vacuum run will be presented.