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2008
Conference Paper
Titel
CMOS-compatible field effect nanoscale gas-sensor: Operation and annealing models
Abstract
Complete modelling of electrically controlled nanoscale gas sensors with Poisson, Wolkenstein, Fokker-Planck and continuity is presented. Based on a plausible Drift explanation we developed suitable models for sensitivity control and operational modes. An onset for CMOS-complying annealing procedures is given.
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