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Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement

: Jung, D.; Kallweit, D.; Sandner, T.; Conrad, H.; Schenk, H.; Lakner, H.


Dickensheets, D.L. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
MOEMS and miniaturized systems VIII : 27 - 28 January 2009, San Jose, California, USA
Bellingham, WA: SPIE, 2009 (SPIE Proceedings Series 7208)
ISBN: 978-0-8194-7454-4
ISSN: 0277-786X
Paper 72080A
Conference "MOEMS and Miniaturized Systems" <8, 2009, San Jose/Calif.>
Fraunhofer IPMS ()
microscanner; vertical comb drive; AVC; SVC; quasi static scanning; solid body mechanism; w2w bonding

A technology approach is presented which enables an initial permanent counter electrode deflection of planar out of plane comb drive actuators allowing quasistatic operation of an electrostatic microscanner. The device is assembled by mounting a top wafer with salient stamps onto a mirror wafer. The commonly fix in plane counter electrode parts on the mirror wafer are connected to deflectable platforms via a mechanical structure of coupled hinges. During the wafers assembly the down pressing stamps displace the platforms and result in a predefined permanent out of plane counter comb deflection.