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In-situ interferometric form testing for adaptive mold finishing

: Schmitt, R.; Brecher, C.; Vielhaber, K.; Tücks, R.; Merz, M.

European Society for Precision Engineering and Nanotechnology -EUSPEN-:
European Society for Precision Engineering and Nanotechnology, EUSPEN 2008. Vol.2 : 10th Anniversary International Conference, Kongresshaus Zürich, 18th-22nd May 08
Bedford: Euspen, 2008
ISBN: 978-0-9553082-5-3
European Society for Precision Engineering and Nanotechnology (EUSPEN International Conference) <10, 2008, Zürich>
Fraunhofer IPT ()

The manufacturing of molds for the replication of optical components is highly demanding due to the small tolerances that are needed in order to fulfill the desired function of the replicated lenses. Form deviations are caused by both the mold insert manufacturing and the replication process. The most common measurement technology in optical testing is interferometric form testing. Usually it is performed in an optical shop because of its sensitivity to environmental influences. If the form deviation in the manufacturing process exceeds the tolerances a corrective manufacturing needs to be carried out. Besides he time consuming re-adjustment of the probe for the next manufacturing step, there is the problem that the measurement data is not available in the machines coordinate system. This paper describes an approach to an adaptive mold finishing with a machine integrated interferometric form testing. A finishing machine for the local correction of the mold is presented as well as an interferometric form testing method which is insensitive to rough ambient conditions.