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ASMC 2001. CD-ROM

Factory Dynamics, Process Control, Advanced Process Technology, Yield Modeling and Analysis, Defect Detection and Reduction. The 12th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference, April 23-24, Munich, Germany
 
: Kaufmann, T.
: Institute of Electrical and Electronics Engineers -IEEE-; Semiconductor Equipment and Materials International -SEMI-, San Jose/Calif.

Brüssel: SEMI Europe, 2001
Advanced Semiconductor Manufacturing Conference (ASMC) <12, 2001, München>
Englisch
Tagungsband
Fraunhofer IPA ()
semiconductor manufacturing; Halbleitertechnologie; Mikroelektronik

: http://publica.fraunhofer.de/dokumente/N-9067.html