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Total reflection x-ray fluorescence as a sensitive analysis method for the investigation of sputtering processes

Totalreflexions-Röntgenfluoreszenz als sensitive Analysemethode zur Untersuchung von Zerstäubungsprozessen
: Sekowski, M.; Steen, C.; Nutsch, A.; Birnbaum, E.; Burenkov, A.; Pichler, P.


Pepponi, G.:
A collection of papers presented at the 12th Conference on Total Reflection X-ray Fluorescence Analysis and Related Methods, TXRF 2007 : Trento, Italy, 18 - 22 June 2007
Amsterdam: Elsevier, 2008 (Spectrochimica acta. Part B, Atomic spectroscopy 63.2008, Nr.12)
ISSN: 0584-8547
Conference on Total X-Ray Fluorescence Analysis and Related Methods (TXRF) <12, 2007, Trento>
Konferenzbeitrag, Zeitschriftenaufsatz
Fraunhofer IISB ()
sputtering; germanium; grazing ion incidence; TXRF

Angular distributions of sputtered germanium atoms during the grazing incidence of argon ions were investigated. Argon ion beams with angles of incidence of 75° and 80° and with ion energy of 20 keV were used in sputtering experiments. TXRF analysis showed to be an excellent method for measuring the angular distribution of sputtered atoms due to its low detection limit under total reflection conditions. The experimental data are compared to Monte-Carlo simulations. The observed differences are discussed, and suggestions for improving the Monte-Carlo simulation of ion sputtering are made.