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High-cycle fatigue and strengthening in polycrystalline silicon

: Boroch, R.E.; Müller-Fiedler, R.; Bagdahn, J.; Gumbsch, P.


Scripta materialia 59 (2008), Nr.9, S.936-940
ISSN: 1359-6462
Fraunhofer IWM ()

The reliability of MEMS-based sensors for automotive applications critically depends on their high-cycle load-bearing capacity. To investigate the influence of high-frequency cyclic loading on mechanical properties of polycrystalline silicon, a statistically based investigation with the use of novel rotational specimens (90 kHz) has been conduced. Either fatigue fracture (above 3 GPa) or strengthening of the material at cyclic loading below 3 GPa has been observed.