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Finish assessment of complex surfaces by advanced light scattering techniques

: Schröder, S.; Duparre, A.


Duparre, A. ; Society of Photo-Optical Instrumentation Engineers -SPIE-, Bellingham/Wash.:
Optical Fabrication, Testing, and Metrology III : Glasgow, United Kingdom, 2 September 2008
Bellingham, WA: SPIE, 2008 (SPIE Proceedings Series 7102)
ISBN: 978-0-8194-7332-5
ISSN: 0277-786X
Paper 71020F
Conference "Optical Fabrication, Testing, and Metrology" <3, 2008, Glasgow>
Fraunhofer IOF ()
roughness; scattering; power spectral density; diamond turning; polish

The tremendous development of optical technologies and new manufacturing methods places challenging demands on metrology. Tools are required which allow for a rapid and sensitive inspection of the quality and homogeneity of surface finish even on large and curved surfaces. Light scattering measurements are best suited to meet these requirements. Recently developed instruments for scatter measurements at various wavelengths are presented in this paper. Examples of application are presented for diamond-turned and polished surfaces as well as for supersmooth EUV mirrors. In addition to laboratory-based instruments, compact and table-top tools currently being developed are briefly presented.