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Highspeed manufacturing of periodical surface and in-volume nanostructures by fs-laser direct writing
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2008
Conference Paper
Titel
Highspeed manufacturing of periodical surface and in-volume nanostructures by fs-laser direct writing
Author(s)
Gottmann, J.
Wortmann, D.
Brandt, N.
Hauptwerk
Photon processing in microelectronics and photonics VII
Konferenz
Conference "Photon Processing in Microelectronics and Photonics" 2008
DOI
10.1117/12.758353
Language
English
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Fraunhofer-Institut für Lasertechnik ILT