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Ultrasonic radiation in dynamic force microscopy

: Hirsekorn, S.; Rabe, U.; Arnold, W.


Applied physics. A 72 (2001), Nr.7, Supplement, S.87-92
ISSN: 0340-3793
ISSN: 0721-7250
ISSN: 0947-8396 (Print)
ISSN: 1432-0630 (Online)
Fraunhofer IZFP ()
atomic force microscopy; cantilever vibration; dynamic mode; interaction forces; ultrasonic radiation

In dynamic force microscopy the cantilever of an atomic force microscope is vibrated at ultrasonic frequencies in the range of several 10 kHz up to several MHz while scanning a sample surface. Amplitude and phase of the cantilever vibration as well as the shift of the cantilever resonance frequencies provide information about local sample surface properties. In several operation modes of dynamic force microscopy, as for example force modulation microscopy, tapping mode or atomic force acoustic microscopy, the sensor tip is in contact with the sample at least during a fraction of its vibration cycle. The periodic indentation of the tip with the sample surface generates ultrasonic waves. In this paper, the ultrasonic radiation of a vibrating cantilever into a sample and its contribution to the damping of the cantilever vibration is calculated. The theoretical results are compared to experiments.