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Buffer management for automated material handling systems in semiconductor industries

 
: Fischmann, Christian; Böttinger, Fabian; Wertz, Roland; Kunz, Christian

Louca, L.S. ; European Council for Modelling and Simulation -ECMS-; Univ. of Cyprus; Institute of Electrical and Electronics Engineers -IEEE-, United Kingdom and Republic of Ireland Section:
22nd European Conference on Modelling and Simulation, ECMS 2008. Proceedings : June 3rd - 6th, 2008, Nicosia, Cyprus
Nicosia, Cyprus, 2008
ISBN: 978-0-9553018-6-5
S.423-427
European Conference on Modelling and Simulation (ECMS) <22, 2008, Nicosia>
Englisch
Konferenzbeitrag
Fraunhofer IPA ()
Automated Material Handling System (AMHS); Logistik; Simulation; Transport; Halbleiter; Fertigung

Abstract
The automated material handling system (AMHS) is a highly automated transport solution of actual 300mm semiconductor waferfabs. The big logistic challenge in such a running system is the just-in-time delivery of lots (carriers). Therefore, beside tracks and vehicles, there are different storages (stocker) and buffers (under track storages and load ports) integrated in such a transport system. To conquer the logistic challenge, an optimum allocation and control strategy for all storage equipment is required. This paper describes the investigation of different storage and buffer strategies based on detailed simulation models of a dedicated semiconductor factory area.

: http://publica.fraunhofer.de/dokumente/N-83874.html