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AFM testing of the nanomechanical behaviour of MEMS micromembranes

: Ekwinski, G.; Goehlich, A.; Trieu, H.-K.; Rymuza, Z.; Koszewski, A.


International journal of materials research 99 (2008), Nr.8, S.879-882
ISSN: 1862-5282
Fraunhofer IMS ()
nanomechanical testing; atomic force microscopy; MEMS membrane

The nanomechanical behaviour of micromembranes for high temperature applications of a microelectro mechanical system pressure sensor has been studied by use of atomic force microscopy. A method was elaborated and used for measure nanometre deformation of the membrane under application of high loads. This method was also useful for identifying failures of a membrane. e.g., undesired position against the substrate of the structure. The tests were performed for a series of membranes. The characteristics of the mechanical behaviour were plotted for different geometrical features of the membranes to identify the influence of geometry and dimension. The method was found to be very effective for the process characterisation of the fabricated MEMS micromembranes devoted, e. g., to high temperature pressure sensors.